Russia is building infrastructure to accelerate the production of photolithographs
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The Ministry of Industry and Trade, the Ministry of Education and Science, semiconductor manufacturers and specialized universities are implementing a project to build a network of test sites in the Russian Federation for testing equipment for the production of microelectronics, which is under development. New infrastructure is also needed for training specialists. The construction of one landfill, taking into account the cost of complex engineering infrastructure, can cost about 5 billion rubles. According to experts, the use of test sites will speed up the start of serial production of the units by about a year.
Vice-Rector of the National Research University “Moscow Institute of Electronic Technology (MIET)” Alexei Pereverzev told Kommersant that it is planned to reconstruct and re-equip one of the university’s buildings. As a result of the work, it will be equipped with engineering infrastructure, on the basis of which a technological test site will appear.
We are talking about the reconstruction of the Proton plant, where it is planned to provide “infrastructure for the possibility of placing technological, scientific and instrumentation equipment,” the Ministry of Industry and Trade specified.
These can be photolithographic installations, network analyzers, steppers and other pieces of equipment that are part of the technological routes of microelectronic and microwave-electronic production, explained Arseniy Brykin, head of the Basis consortium. An interlocutor in one of the semiconductor manufacturers adds that the landfill should be equipped with the infrastructure necessary to supply especially pure liquids, chemicals, gases: “These are, for example, pipes with a specific surface, water treatment plants.”
“The test site is a platform for the development and transfer of basic technological processes based on new equipment and the training of engineering and scientific personnel together with industrial and academic partners,” Mr. Pereverzev told Kommersant. According to him, each piece of equipment will have a digital twin to reduce the cycle of development and certification of technological processes. “The organization of virtual production lines will increase the volume of training of specialists in the field of electronic engineering, processes and technologies of the electronic component base,” added Alexey Pereverzev.
A Kommersant source familiar with the details of the project says that the landfill will be launched in the fall of 2026.
The interlocutor of Kommersant in one of the semiconductor manufacturers clarifies that similar test sites are also planned to be built in St. According to him, the cost of engineering infrastructure alone is about 1.7 billion rubles, which is 30-40% of the costs. Thus, the total cost of one landfill can be 4.2–5.6 billion rubles. Construction, says a Kommersant source, is part of the federal project “Training of Personnel and the Scientific Foundation in the Electronic Industry”, supervised by the Ministry of Education and Science. There, “Kommersant” was not answered.
The development and experimental launches of equipment for the production of microelectronics outdoors, where serial production is taking place, is a standard practice: ITRI in Taiwan, IBM in the USA, CEA-Leti in France have similar clean rooms specialized for R&D machine builders, Mikron explains: “We believe the format is correct and are interested in the appearance of such polygons.”
Today, equipment for the semiconductor and radio-electronic industry is being developed by a number of Russian enterprises commissioned by the Ministry of Industry and Trade. For example, in November 2021, the Zelenograd Nanotechnology Center won tenders for 5.7 billion rubles. for the creation of a photolithographic installation capable of operating according to standards up to 130 nm, and for 985 million rubles. for the development of a setup under 350 nm. The co-executors are Lassard and the Belarusian Planar, follows from the tender documentation (see “Kommersant” dated November 11, 2021). CNews in early July, referring to the tender documentation, wrote that the Ministry of Industry and Trade announced five new tenders for a total of 9.2 billion rubles. to carry out experimental design work (R&D) for the development of technologies and the creation of industrial installations for the production of microcircuits in 250–65 nm topologies.
The general director of the Zelenograd Nanotechnology Center, Anatoly Kovalev, explained to Kommersant that the test site solves the problem of debugging and testing equipment: “If you test and fine-tune installations at existing Russian semiconductor plants, which are not so numerous in the country, you will have to disrupt technological processes, stop production.” According to Mr. Kovalev, the use of test sites will speed up the start of serial production of the units by about a year.
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